GEMSTAR™ ALD Process Systems


Founded in 2003, Arradiance combines unique talents in material science, charged particle physics, equipment design, modeling and simulation, vacuum technology, and metrology. With a concentration in charged particle detection and amplification, Arradiance is the first to develop and demonstrate the capability of producing high gain, low noise micro channel amplifiers. Using our proprietary Atomic Layer Deposition (ALD) materials and equipment, Arradiance offers a new approach to electron amplification devices replacing the legacy traditional lead-glass/hydrogen firing process developed in 1960’s currently used for all state-of-the-art MCP applications.

 

ARRADIANCE® manufactures 150mm and 200mm research-grade Atomic Layer Deposition (ALD) systems for a variety of applications . Our systems, such as the GEMSTAR-R2™, are designed to deposit defect free resistive and emissive coatings that are uniform in thickness, even deep inside high aspect ratio (HAR) structures such as Microchannel Plates or Channel Electron Multipliers. The ability to deposit such high quality films on substrates with ultra-high aspect ratios is a key feature of ARRADIANCE® systems.

Engineered ALD Materials, Processes and Coatings

ARRADIANCE® will design an ALD process to suit your specific device performance requirements on your 3D own substrates up to 200mm Wide and 25mm Thick. Specializing in material resistance control, ask us about your needs. MgO, CaO, CaHfO, SrO, Sc2O3, Y2O3, La2O3, LaF3, TiO2, TiN, ZrO2, Zr3N4, HfO2, Hf3N4, V2Ox, Nb2O5, Ta2O5, TaN, Mo, MoN, WOx, W, MnO, MnS, Fe2O3, Ru, RuOx, Co, CoN, Rh2O3, Rh, Ir, NiO, NiNx, Ni, Pt, PtOx, Pd, Cu, CuOx, CuNx, CuS, ZnO, ZnS, ZnF, CdS, Al2O3, AlN, Ga2O3, In2O3, SiO2, SnO2, SnS, PbO, PbS, Bi2O3, Pr2O3, Ce2O3, Sm2O3, Eu2O3, Gd2O3, Dy2O3, Ho2O3, Er2O3, Tm2O3, Lu2O3.

Custom Process Systems

ARRADIANCE® will design and fabricate custom deposition, gas management and metrology equipment meeting your specific needs.

GEMSTAR™ Product Information


GEMSTAR-6 Data Sheet
GEMSTAR-8 Data Sheet
GEMSTAR-A Data Sheet