Benchtop Plasma System

The PE is a complete industrial grade plasma treatment solution – capable of plasma cleaning, plasma etching,reactive ion and more.

This model is available in one of the three configurations:

  1. Plasma Cleaning / Etching
  2. Reactive Ion Etching(RIE)
  3. Convertible  configuration – includes both isotropic and anisotropic plasma processing in a single system. Removable tray configuration

PE 100

Benchtop Plasma System

The PE is a complete industrial grade plasma treatment solution – capable of plasma cleaning, plasma etching,reactive ion and more.

This model is available in one of the three configurations:

  1. Plasma Cleaning / Etching
  2. Reactive Ion Etching(RIE)
  3. Convertible  configuration – includes both isotropic and anisotropic plasma processing in a single system. Removable tray configuration

TECHNICAL DOCUMENTS

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