Products Features

  • Pairs with all types of process tools and environments.
  • Super reliable, absolute encoder, 4-axis robots.
  • Can service up to 3 process tools.
  • 300mm automation platform, adaptable for 200mm and smaller substrates.
  • Robots fitted with range of end effector technologies, including vacuum, Bernoulli, edge grip and more.
  • Full safety guarding (OSHA and ANSI compliant)

Wafermate 300

Products Features

  • Pairs with all types of process tools and environments.
  • Super reliable, absolute encoder, 4-axis robots.
  • Can service up to 3 process tools.
  • 300mm automation platform, adaptable for 200mm and smaller substrates.
  • Robots fitted with range of end effector technologies, including vacuum, Bernoulli, edge grip and more.
  • Full safety guarding (OSHA and ANSI compliant)
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TECHNICAL DOCUMENTS

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