Wafermate 300
Products Features
- Pairs with all types of process tools and environments.
- Super reliable, absolute encoder, 4-axis robots.
- Can service up to 3 process tools.
- 300mm automation platform, adaptable for 200mm and smaller substrates.
- Robots fitted with range of end effector technologies, including vacuum, Bernoulli, edge grip and more.
- Full safety guarding (OSHA and ANSI compliant)