Products Features

Pairs seamlessly with multiple process tools.

• Configurable for two, three or four cassette positions.
• Suitable for all open cassette presentation formats.
• Accomodates film frames, 300mm open cassettes, and special thin and warped wafer components.
• Features 4-axis robots.
• Full safety guarding (OSHA and ANSI compliant).
• Suitable for 50mm to 200mm wafers, or 300mm from shipping cassette.