PV-360

The PV-360 is a high-volume, in-line spray doping system for the thin and uniform application of phosphoric and boric acid based dopants to crystalline photovoltaic cells for the in-line thermal diffusion and laser doped selective emitter processes. Now in its 3rd generation, the PV-360 leverages USI’s proprietary nozzle-less ultra-Thin Coating Application Technology (tCAT) for a more uniform, thinner coating compared to conventional nozzle based spray, roll coating or fog coating technologies.
Features and benefits:
• Proprietary, nozzle-less ultra-Thin Coating Application Technology (tCAT)
• Typical coatings applied include:
o Phosphoric acid based dopants
o Boric acid based dopants
o Compatible with water based and solvent based dopants
• Non-contact coating application with excellent coating transfer efficiency – up to 99%
• Process width: 914mm (36 inches)
• Compatible with any in-line thermal diffusion furnace
• Long-life, high speed traversing mechanism with servo motor drive
• Constructed with materials compatible with acidic and caustic coating liquids
• Isolated and ventilated spray area
• PAC controller with touchscreen HMI
• PMP-200 Precision Metering Pump liquid delivery system, features:
o Servo drive positive displacement liquid metering pump
o Dual pump design for uninterrupted operation
o Automatic pump refill from on-board PFA coating reservoir
o Data logging
• Conveyor system:
o Teflon coated Kevlar mesh belt
o Up to 1.8 meters/minute (5.9 feet/minute) speed
o Accommodates up to six (6) rows of 125mm (5 inch) wafers
o Integrated water-based conveyor belt cleaning and drying system
o Water-based conveyor belt cleaning system
• Optional wafer drying system